Dongguan Xinshengda Electromechanical Equipment Co., Ltd. provides Edward Semiconductor dry pump EPX180L series maintenance and sales, Edward Semiconductor dry pump EPX180L/LE/N series maintenance, Edward Semiconductor dry pump EPX180L series supply, Edward Semiconductor dry pump EPX180L series repair parts Where to buy,

The characteristics of Edward EPX180 high vacuum dry pump are: better performance and lower operating cost. EPX180 uses a special patented protection mechanism, which can be evacuated from atmospheric pressure to an ultimate pressure of less than 7 × 10-5 Torr.

Based on the acclaimed and successful IPX series, the modular EPX180 delivers performance in a package that is 20% lighter, 30% smaller and 40% less power efficient than IPX.

EPX Series Key Features and Benefits

1. Small footprint and light weight—As one of the gadget-on-pumps available, the EPX saves space significantly. The aluminum construction makes it lightweight and adds mounting options. The EPX can be mounted directly to the tool, saving foreline plumbing and installation costs, and can be used remotely if desired.

2. Patented special pump mechanism - EPX can be evacuated from atmospheric pressure to UHV level base pressure and can operate continuously at all inlet pressures.

3. Ultra-clean mechanism - traditional high vacuum bearings are lubricated with grease, which can be a source of contamination in process tools. EPX pumps do not have high vacuum bearing grease and do not present any other potential sources of contamination

4. Very reliable - The EPX has an MTBFp of about 13 years (SEMIE10) and is usually serviced every 5 years, which maximizes the life of the pump.

The EPX series supports clean and light-duty semiconductor processing applications such as ashing/stripping and implant end-station applications.

The EPX series provides on-tool pumping in an extremely light, tiny package for exceptionally clean vacuums. The EPX pump uses a patented special uniaxial regeneration Holweck? stage mechanism, which can be evacuated from atmospheric pressure to an ultimate pressure of less than 7 × 10-7 Torr.

EPX pumps offer enhanced performance in modular components that can be integrated into process tools or remotely mounted. In addition, the integrated MicroTIM electronic module allows easy communication with process tools.

13509820116

EPX180L/EPX180LE technical parameters:

Peak speed 170m3h-1

                                                  105ft3min-1

                                                   2835 Imin-1

Ultimate vacuum <1×104mbar

                                                   <7.5x10-5Tor

                                                   <1×10-2Pa

Warm-up time (to nominal performance) 30 minutes

Inlet flange ISO63

Outlet flange NW25

Noise <59 dB(A)

Water Connector 3/8in

Small cooling water flow rate 2 lm-1

Cooling water temperature 15-35°

Power supply 200/208V, 50/60Hz three-phase

Limit power 1.4kW

Motor rated power 3.0kW

TIM C3

Weight 43.5kg

Dongguan Xinshengda Electromechanical Equipment Co., Ltd. provides Edward Semiconductor dry pump EPX180L series maintenance and sales, Edward Semiconductor dry pump EPX180L/LE/N series maintenance, Edward Semiconductor dry pump EPX180L series supply

Dongguan Xinshengda Electromechanical Equipment Co., Ltd. is mainly engaged in the vacuum pump industry, sales and maintenance of vacuum pumps, customized vacuum pump systems, single-stage rotary vane oil vacuum pumps, oil-free piston vacuum pumps, oil-free diaphragm pumps, dry Roots vacuum pumps, Dry screw pump, dry claw vacuum pump, scroll vacuum pump, vacuum pump repair/maintenance; German BUSCH, Becker, Rietschle, Leybold, pfeiffer, British Edwards, French Alcatel ALCATEL, Japan Orion, ULVAC, KASHIYAMA, Ebara, Agilent, Tuthill, Sullair, Taiwan Hanbell HANBELL, Shen Keyi SKY and other brands; supply vacuum pump accessories , Vacuum pump oil, vacuum pump oil mist separator, vacuum pump air filter, oil grid, fan, vacuum pump blade, rotary vane, carbon chip service hotline 13509820116.